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CzechNanoLab Research Infrastructure

Brno University of Technology
Institute of Physics, CAS
Masaryk University

 

 


 

Expertise & Equipment Equipment map

Equipment map

  1. Synthesis
    1. CVD
      1. ALD
      2. LPCVD
      3. MOVPE
      4. PECVD
    2. Chemical synthesis
    3. Molecular manipulation
    4. PVD
      1. Evaporation
      2. MBE
      3. PLD
      4. Sputtering
      5. Thermal evaporation
  2. Characterization
    1. 3D tomography
      1. Secondary Ion Mass Spectroscopy
      2. X-ray computed tomography
    2. Electron microscopy
      1. Scanning electron microscopy
      2. Transmission electron microscopy
    3. Light microscopy
      1. Magneto-optical microscopy
      2. Pump-probe
      3. Scanning thermoelectrical microscopy
    4. Magnetic resonance
      1. Electron spin resonance spectroscopy
    5. Scanning probe microscopy
      1. Atomic force microscopy
      2. Magnetic force microscopy
      3. Nanoindentation
      4. Profilometry
    6. Spectroscopy
      1. Electron spin resonance spectroscopy
      2. Laser-Induced Breakdown Spectroscopy
      3. Magneto-optical spectroscopy
      4. Optical spectroscopy and ellipsometry
      5. Secondary Ion Mass Spectroscopy
      6. X-ray photoelectron spectroscopy
    7. X-ray diffraction
      1. General diffraction
      2. Powder diffraction
  3. Devices
    1. Depositions -> Synthesis
    2. Dry etching
      1. DRIE
      2. Other
      3. RIE
    3. Lithography
      1. Direct write
      2. E-beam
      3. Inspection
      4. Ion-beam
      5. Nanoimprint
      6. Resist processing
      7. UV
    4. Packaging
      1. Contacting
      2. Dicing
    5. Testing
  4. Theory

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