FOUR-POINT PROBE

The Ossila Four-Point Probe is an easy-to-use tool for the rapid measurement of sheet resistance of thin films. Sheet resistance (also known as surface resistance or surface resistivity) is a common electrical property used to characterize thin films of conducting and semiconducting materials. It is a measure of the lateral resistance through a thin square of material, i.e. the resistance between opposite sides of a square. The key advantage of sheet resistance over other resistance measurements is that it is independent of the size of the square, enabling easy comparisons between different samples.

Specification

Electrical Specifications:

Voltage Range ±100 μV to ±10 V
Current Range ±1 μA to ±200 mA (5 ranges)
Sheet Resistance Range 100 mΩ/□ to 10 MΩ/□ (ohms per square)

Sheet Resistance Accuracy* Precision** Measured at Range
100 mΩ/□ ±8% ±3% 200 mA
1 Ω/□ ±2% ±0.5% 200 mA
10 Ω/□ ±1% ±0.5% 200 mA
100 Ω/□ ±1% ±0.05% 20 mA
1 kΩ/□ ±1% ±0.03% 20 mA
10 kΩ/□ ±1% ±0.02% 2000 µA
100 kΩ/□ ±2% ±0.05% 200 µA
1 MΩ/□ ±8% ±0.5% 20 µA
10 MΩ/□ ±30% ±5% 20 µA

 
Physical Specifications:

Probe Spacing 1.27 mm (0.05")
Rectangular Sample Size Range Long Edge Minimum: 5 mm (0.20")
Short Edge Maximum: 152.4 mm (6")
Circular Sample Size Range (Diameter) 5 mm to 152.4 mm
(0.20" to 6.00")
Maximum Sample Thickness 8 mm (0.31")
Overall Dimensions (W x H x D) 145 mm x 150 mm x 240 mm
(5.71" x 5.91" x 9.45")

Details

Type of access
Full-service (proposal-based), Full-service (paid), Self-service
Research area
Devices
Category
Testing
Guarantor
Danchuk, Viktor
Site
CEITECNANO
Location
CEITEC - C1.57