AIXTRON 200 horizontal reactor

Specification

Methods

Epitaxial growth of monocrystalline thin films and heterostructures combining GaAs, AlGaAs, In(Ga)As, GaSb, GaAsSb, Al(Ga)Sb or In(Ga)Sb layers

Details

Type of access
Full-service (proposal-based)
Research area
Synthesis
Category
CVD
Subcategory
MOVPE
Guarantor
Hospodková, Alice
Site
LNSM
Expertise