High temperature plasma enhanced chemical vapour deposition system on C-based materials Oxford Instruments Plasma Technology NanoFab
Chemical vapour deposition system going to very high deposition temperatures dedicated to the deposition of carbon nanomaterials, possibilities of plasma enhancement by discharges of different frequency (including their regular switching).
Specification
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CCP 13.56 MHz at the upper electrode |
max. power 600 W |
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high frequency 50-400 kHz plasma source |
max. power 300 W |
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substrate temperature |
RT to 1000 °C |
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grounded substrate |
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sample size |
up to 6" |
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He backside cooling |
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loadlock |
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Gases |
O2, Ar2, CH4, C2H2, H2 |
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Processes |
deposition of carbon nanotubes and graphene |
Gallery
Publications
ROY, R.; NEČAS, D.; ZAJÍČKOVÁ, L., 2021: Evidence of flexoelectricity in graphene nanobubbles created by tip induced electric field. CARBON 179, p. 677 - 6, doi: 10.1016/j.carbon.2021.04.086 (PECVD-NANOFAB, ICON-SPM, WITEC-RAMAN)
KAUSHIK, P.; ELIÁŠ, M.; PRÁŠEK, J.; MICHALIČKA, J.; ZAJÍČKOVÁ, L., 2021: Manipulating MWCNT/TiO2 heterostructure morphology at nanoscale and its implications to NO2 sensing properties. MATERIALS CHEMISTRY AND PHYSICS 271, p. 124901-1 - 11, doi: 10.1016/j.matchemphys.2021.124901 (EVAPORATOR, PECVD-NANOFAB, DIENER, ALD-FIJI, RIGAKU9, VERIOS, TITAN)
Polzer, A.; Sedlak, J.; Sedlacek, J.; Benes, L.; Mouralova, K., 2021: Vertical graphene growth on AlCu4Mg alloy by PECVD technique. COATINGS 11 (9), doi: 10.3390/coatings11091108 (PECVD-NANOFAB, TITAN, HELIOS, ICON-SPM)
Michal, L., 2020: Synthesis and study of graphene materials. MASTER'S THESIS, p. 1 - 54 (PECVD-NANOFAB, WITEC-RAMAN, KRATOS-XPS)
KAUSHIK, P.; ELIÁŠ, M.; MICHALIČKA, J.; HEGEMANN, D.; PYTLÍČEK, Z.; NEČAS, D.; ZAJÍČKOVÁ, L., 2019: Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing. SURFACE AND COATINGS TECHNOLOGY 370, p. 235 - 9, doi: 10.1016/j.surfcoat.2019.04.031 (ALD-FIJI, EVAPORATOR, PECVD-NANOFAB, WOOLLAM-VIS, RIGAKU3, KRATOS-XPS, VERIOS, TITAN)
Mouralova, K.; Zahradnicek, R.; Bednar, J., 2019: Study of vertical graphene growth on silver substrate based on design of experiment. DIAMOND AND RELATED MATERIALS 97, p. 107439-1 - 107439-7, doi: 10.1016/j.diamond.2019.107439 (EVAPORATOR, PECVD-NANOFAB, VERIOS, HELIOS, ICON-SPM, TITAN)