Cross section/broad beam ion polisher Leica EM TIC3X
Device for ion polishing samples for scanning electron microscopy beam of light ions, enabling the creation of precise cross sections fragile, heterogeneous, porous and temperature sensitive materials for their studies by scanning electron microscopy and analytical methods EBSD, EDS and WDS. Furthermore, the instrument allows ion polishing large surfaces at oblique incidence of the ion beam for studying the foregoing materials mentioned methods.
Specification
Ion source
| Ion source | Triple ion source, single controllable guns |
|---|---|
| Ion energy | 1 keV to 10 keV |
| Source current | 0.5 to 4.5 mA / 0.1 mA stepsize (per ion source) |
| Ion current density | 10 mA/cm² (per ion source) |
| Ion beam diameter (FWHM) | 0.8 mm (at 10 keV), 2.5 mm (at 2 keV) |
| Gas | Argon, minimal purity 99.999 % (Ar 5.0) |
Sample stages
| Cooling stage for cross-section polishing | |
|---|---|
| temperature range | from +30 to –150 °C ±5 °C |
| warm-up temperature | from +1 to +50 °C |
| sample size | up to 25 × 20 mm x 5 mm (thick) |
| stage movement | x-direction: ±5 mm; y: ±1 mm; z: 6 mm |
| Multiple sample stage | |
|---|---|
| number of samples per batch | up to 3 in separate holders |
| maximum sample size |
10 x 10 x 6 mm (thickness 6 mm achievable using different holders 0 - 3 mm and 2,5 - 6 mm) |
| stage movement | x-direction: 0 mm; y: ±1 mm; z: 4 mm; rotary oscillation: ±5 ° |
| Standard stage for cross-section polishing | |
|---|---|
| sample size | up to 50 × 50 mm x 5 to 10 mm (thick) |
| Mask position accuracy | < ±2 μm |
| Cutting area | Depth > 1 mm, Width > 4 mm |
| stage movement | x-direction: ±5 mm; y: ±1 mm; z: 6 mm |
| Rotary stage for planar polishing | |
|---|---|
| max. sample size | Ø 38mm / 12mm thick |
| max. ion beam polished area | Ø 25mm (for sample diameter of 25mm) |
| max. lateral movement settings | |
| sample Ø 38mm | ± 3mm |
| sample Ø 35mm | ± 5mm |
| sample Ø 33mm | ± 6mm |
| sample Ø 30mm | ± 8mm |
| sample Ø 28mm | ± 9.5mm |
| sample Ø 25mm | ± 11.5mm |
| sample < Ø 20mm | ± 12.5mm |
| ion beam incident angle settings (1.5° increments) | |
| sample Ø 38mm | 0° – 12° |
| sample Ø 35mm | 0° – 13° |
| sample Ø 33mm | 0° – 14° |
| sample Ø 30mm | 0° – 15° |
| sample Ø 28mm | 0° – 16° |
| sample Ø 25mm | 0° – 18° |
| sample Ø 23mm | 0° – 36° |
| sample < Ø 20mm | 0° – 48° |
| lateral speed setting | 0.1 – 2mm/s |
| rotation speed setting | Low (~2rpm) |
| Medium (~6rpm) | |
| High (~10rpm) | |
Cross-sectioning adaptor for the rotary stage |
|
| max. sample size | Width = 10 mm; Height = 7 mm; Thickness = 4 mm |
| max. angle of attack of ion beams | 0 ° - 12 ° |
| available stage movements |
X, Y, Z = 0 mm NO rotation, only oscillation ± 45 ° maximum |
Publications
SUCHÝ, J.; KLAKURKOVÁ, L.; MAN, O.; REMEŠOVÁ, M.; HORYNOVÁ, M.; PALOUŠEK, D.; KOUTNÝ, D.; KRIŠTOFOVÁ, P.; VOJTĚCH, D.; ČELKO, L., 2021: Corrosion behaviour of WE43 magnesium alloy printed using selective laser melting in simulation body fluid solution. JOURNAL OF MANUFACTURING PROCESSES 69, p. 556 - 11, doi: 10.1016/j.jmapro.2021.08.006 (VERIOS, TIC3X, RIGAKU3)
ŠŤASTNÝ, P.; VACEK, P.; TRUNEC, M., 2020: Characterization of microstructure and phase distribution of sintered multiphasic calcium phosphate bioceramics. CERAMICS INTERNATIONAL 46 (4), p. 5500 - 5, doi: 10.1016/j.ceramint.2019.10.300 (TIC3X, VERIOS, RIGAKU3, TITAN, HELIOS)