High vacuum coating system for electron microscopy Leica Microsystems EM ACE 600
High vacuum coater for deposition of conductive coatings on SEM and TEM samples. Processes are driven by bulit-in microprocessor control unit and are fully automatized. Process steps and parameters are set through a touch screen. Equipped with Au sputter target as s standard. Other available targets for the sputtering are: Cr, W, Co, Ti, Al, Pt/Pd.
Specification
| Process vacuum | 5x10−5 mbar @ 15 min |
|---|---|
| Ultimate vacuum | 2x10−6 mbar @ 24 hour |
| Working distance | min. 30 mm, max. 100 mm (z movement motorized) |
| Specimen table | diameter 104 mm |
| Stage tilt | +/- 60° (motorized) |
| Coating time | 1–1800 s (without respect to sample damage) |
| Coating thickness | 1–1000 nm |
| Coating thickness detection | oscillating quartz crystal, readout resolution: one decimal (0.1 nm accuracy) |
| Process gas for sputtering | Argon 99,99 % or better |
| Venting gas | Nitrogen 99,99 % |
Publications
REMEŠOVÁ, M.; TKACHENKO, S.; KVARDA, D.; ROČŇÁKOVÁ, I.; GOLLAS, B.; MENELAOU, M.; ČELKO, L.; KAISER, J., 2020: Effects of anodizing conditions and the addition of Al2O3/PTFE particles on the microstructure and the mechanical properties of porous anodic coatings on the AA1050 aluminium alloy. APPLIED SURFACE SCIENCE, p. 1 - 10, doi: 10.1016/j.apsusc.2020.145780 (LYRA, LEICACOAT-NANO)