Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
SEM/FIB is a type of microscope where a focused electron/ion beam is scanned over the sample to generate an image of the surface or to modify it with nanometric resolution (usually better than 10 nm). The image is formed by detecting secondary and backscattered electrons emitted from the impact place of particle beam. The Gas Injection System (GIS) provides a gas inlet for gaseous precursors, thus allowing deposition and enhanced or selective etching on the sample surface using advanced surface chemistry. The microscope is equipped with two closed loop nanomanipulators (optionally two more can be installed), which allows measurement of 2-probe or 4-probe current-voltage characteristics. The tool is equipped with Electron Dispersive X-Ray spectroscopy analyser (EDX) for elemental analysis. Applications include positive/negative lithography, sample imaging and modification, electrical measurements and basic chemical and elemental analysis.
Specification
Methods
Accelerating voltage: 200 V to 30 kV (50 V in BD mode) Probe current: 2 pA - 200 nA View field: > 6 x 6 mm2 at WD 9 mm Magnification: 1x - 1,000,000 x Detectors (Resolution): Secondary Electron detector (Everhart-Thornley YAG crystal, 1.2 nm at 30 kV ) + Beam Deceleration mode (1.8 nm at 3 kV), Backscattered SE detector (Everhart-Thornley YAG crystal, 2.0 nm at 30 kV ), In-Beam BSE detector (Everhart-Thornley YAG crystal, 2.0 nm at 15 kV), Transmitted Electron detector (0.9 nm at 30 kV) Electron Beam Induced Current detector (pA meter)Features
- Scanning Electron Microscope with Schottky cathode
- Focused Ion Beam column with Ga Liquid – Metal Ion Source with nanometric resolution
- Gas Injection System with inlets for up to 5 precursors for deposition and etching of materials
- Electron Dispersive X-ray spectroscopy for chemical and elemental analysis
- Two fixed closed loop nanomanipulators + additional two sample stage nanomanipulators for electrical measurements
- Ready for Transmission Electron Microscopy sample preparation
- Electron and Ion Beam Lithography software (milling, etching, deposition)
- Integrated controlling software
- Active antivibration suspension system
- Decontaminator/plasma cleaner
Scanning Electron Microscope (SEM)
| Tescan LYRA 3 | FEG |
|---|---|
| Accelerating voltage | 200 V – 30 kV, 50 V to 30 kV in Beam Deceleration Mode (BDM) |
| Probe current | 2 pA – 200 nA |
| Detectors / Resolution | Secondary Electrons (SE) / 1.2 nm at 30 kV/ 2.5 nm at 3 kV |
| SE ( BDM) / 1.5 nm at 3 kV | |
| In-Beam BSE / 2.0 nm at 15 kV | |
| Backscattered Secondary Electrons (BSE) / 2 nm at 30 kV | |
| Transmitted Electrons(TE) | |
| Electron Beam Induced Current (EBIC) | |
| Chamber vacuum | |
| Specimen Stage Movements | X = 130 mm (–50 mm to +80 mm) |
| Y = 130 mm (–65 mm to +65 mm) | |
| Z = 100 mm | |
| Rotation: 360° continuous | |
| Tilt: –30° to +90° |
Focused Ion Beam (FIB)
| Ion Column | Canion |
|---|---|
| Ion Gun | Ga Liquid Metal Ion Source |
| Accelerating voltage | 0.5 kV to 30 kV |
| Probe current | 1 pA to 40 nA |
| SEM-FIB Coincidence at | WD 9 mm for SEM – WD 12 mm for FIB |
| SEM-FIB angle | 55° |
Gas Injection System (GIS)
| Number of GIS channels installed | 5 |
|---|---|
| Type of precursors available | Insulator (SiOx), Water, Fluorine, Platinum, Tungsten |
Energy Dispersive X-ray (EDX) Detector
| Detector type | Bruker XFlash 5010 |
|---|---|
| Energy resolution | ≤ 129 eV @ MnKα |
| 59 eV @ FKα | |
| 52 eV @ CK |
Gallery
Publications
MICHLÍČEK, M.; BLAHOVÁ, L.; DVOŘÁKOVÁ, E.; NEČAS, D.; ZAJÍČKOVÁ, L., 2021: Deposition penetration depth and sticking probability in plasma polymerization of cyclopropylamine. APPLIED SURFACE SCIENCE 540, p. 1 - 10, doi: 10.1016/j.apsusc.2020.147979 (WOOLLAM-VIS, LYRA, FTIR, KRATOS-XPS)
GAO, W.; PUMERA, M., 2021: 3D Printed Nanocarbon Frameworks for Li-Ion Battery Cathodes. ADVANCED FUNCTIONAL MATERIALS, p. 2007285-1 - 10, doi: 10.1002/adfm.202007285 (VERIOS, LYRA, KRATOS-XPS)
OLIVER, C.; IBANEZ, R.; FLORES-MERINO, M.; VOJTOVÁ, L.; ŠALPLACHTA, J.; ČELKO, L.; KAISER, J.; MONTUFAR JIMENEZ, E., 2021: Lyophilized Polyvinylpyrrolidone Hydrogel for Culture of Human Oral Mucosa Stem Cells. MATERIALS 14 (1), p. 1 - 14, doi: 10.3390/ma14010227 (FTIR, WITEC-RAMAN, LYRA)
ŠIMŮNKOVÁ, H.; LEDNICKÝ, T.; WHITEHEAD, A.; KALINA, L.; ŠIMŮNEK, P.; HUBÁLEK, J., 2021: Tantalum-based nanotube arrays via porous-alumina-assisted electrodeposition from ionic liquid: Formation and electrical characterization. APPLIED SURFACE SCIENCE 548, p. 149264 - 10, doi: 10.1016/j.apsusc.2021.149264 (LYRA, ICON-SPM)
MUNOZ MARTIN, J.; REDONDO NEGRETE, E.; PUMERA, M., 2021: Chiral 3D-printed Bioelectrodes. ADVANCED FUNCTIONAL MATERIALS 31 (16), p. 2010608-1 - 9, doi: 10.1002/adfm.202010608 (LYRA, KRATOS-XPS, WITEC-RAMAN)
REDONDO NEGRETE, E.; PUMERA, M., 2021: MXene-functionalised 3D-printed electrodes for electrochemical capacitors. ELECTROCHEMISTRY COMMUNICATIONS 124, p. 1 - 6, doi: 10.1016/j.elecom.2021.106920 (LYRA, KRATOS-XPS, WITEC-RAMAN)
Muñoz, J.; Redondo, E.; Pumera, M., 2021: Bistable (Supra)molecular Switches on 3D-Printed Responsive Interfaces with Electrical Readout. ACS APPLIED MATERIALS & INTERFACES 13 (11), p. 12649 - 12655, doi: 10.1021/acsami.0c14487 (KRATOS-XPS, LYRA)
KOMAROV, P.; JECH, D.; TKACHENKO, S.; SLÁMEČKA, K.; DVOŘÁK, K.; ČELKO, L., 2021: Wetting Behavior of Wear-Resistant WC-Co-Cr Cermet Coatings Produced by HVOF: The Role of Chemical Composition and Surface Roughness. JOURNAL OF THERMAL SPRAY TECHNOLOGY, p. 1 - 19, doi: 10.1007/s11666-020-01130-6 (LYRA, KRATOS-XPS)
ŠŤASTNÝ, P.; CHLUP, Z.; ČÁSTKOVÁ, K.; TRUNEC, M., 2021: High strength alumina tapes prepared by gel-tape casting method. CERAMICS INTERNATIONAL 47 (5), p. 6988 - 8, doi: 10.1016/j.ceramint.2020.11.048 (VERIOS, LYRA)
Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS, p. 1 - 113 (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
WANG, L.; GAO, W.; NG, S.; PUMERA, M., 2021: Chiral Protein-Covalent Organic Framework 3D-Printed Structures as Chiral Biosensors. ANALYTICAL CHEMISTRY 93 (12), p. 5277 - 7, doi: 10.1021/acs.analchem.1c00322 (VERIOS, KRATOS-XPS, LYRA)
NOVCIC, K.; IFFELSBERGER, C.; NG, S.; PUMERA, M., 2021: Local electrochemical activity of transition metal dichalcogenides and their heterojunctions on 3D-printed nanocarbon surfaces. NANOSCALE 13 (10), p. 5324 - 9, doi: 10.1039/d0nr06679f (LYRA, KRATOS-XPS)
Zadorozhnii, O., 2021: Exchange bias in metamagnetic heterostructures. MASTER'S THESIS, p. 1 - 81 (MAGNETRON, VERSALAB, KERR-MICROSCOPE, RAITH, RIE-FLUORINE, LYRA, UHV-XPS)
TURČAN, I.; FLAJŠMAN, L.; WOJEWODA, O.; ROUČKA, V.; MAN, O.; URBÁNEK, M., 2021: Spin wave propagation in corrugated waveguides. APPLIED PHYSICS LETTERS 118 (9), p. 1 - 5, doi: 10.1063/5.0041138 (HELIOS, LYRA, ICON-SPM, RAITH, KERR-MICROSCOPE, VERSALAB, VNA-MPI, BRILLOUIN)
KLEMENT, R.; DRDLÍKOVÁ, K.; KACHLÍK, M.; DRDLÍK, D.; GALUSEK, D.; MACA, K., 2021: Photoluminescence and optical properties of Eu3+/Eu2+-doped transparent Al2O3 ceramics. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 41 (9), p. 4896 - 11, doi: 10.1016/j.jeurceramsoc.2021.03.029 (LYRA, TITAN)
SOBOLA, D.; KASPAR, P.; ČÁSTKOVÁ, K.; DALLAEV, R.; PAPEŽ, N.; SEDLÁK, P.; TRČKA, T.; ORUDZHEV, F.; KAŠTYL, J.; WEISER, A.; KNÁPEK, A.; HOLCMAN, V., 2021: PVDF Fibers Modification by Nitrate Salts Doping. POLYMERS 13 (15), p. 1 - 15, doi: 10.3390/polym13152439 (KRATOS-XPS, FTIR, RIGAKU3, LYRA, WITEC-RAMAN, JAZ3-CHANNEL)
Vinogradov, A.; Heczko, M.; Mazánová, V.; Linderov, M.; Kruml, T., 2021: Kinetics of cyclically-induced mechanical twinning in γ-TiAl unveiled by a combination of acoustic emission, neutron diffraction and electron microscopy. ACTA MATERIALIA 212, doi: 10.1016/j.actamat.2021.116921 (LYRA, TITAN)
Brodský J., 2021: Gas sensors based on 1D and 2D materials. MASTER'S THESIS, p. 1 - 84 (DWL, DIENER, SUSS-RCD8, SUSS-MA8, EVAPORATOR, MPS150, WITEC-RAMAN, ICON-SPM, RIE-FLUORINE, DRIE, LYRA)
Mouralova, K.; Polzer, A.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2021: Machining of B1914 nickel-based superalloy using wire electrical discharge machining. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART E: JOURNAL OF PROCESS MECHANICAL ENGINEERING, doi: 10.1177/09544089211031746 (LYRA, DEKTAK, HELIOS, TITAN)
Mouralova, K.; Prokes, T.; Benes, L., 2020: Analysis of the oxide occurrence on WEDM surfaces in relation to subsequent surface treatments. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART C: JOURNAL OF MECHANICAL ENGINEERING SCIENCE 234 (3), p. 721 - 733, doi: 10.1177/0954406219884974 (LYRA)
LEDNICKÝ, T.; BONYÁR, A., 2020: Large Scale Fabrication of Ordered Gold Nanoparticle-Epoxy Surface Nanocomposites and Their Application as Label-Free Plasmonic DNA Biosensors. ACS APPL MATER INTER 12 (4), p. 4804 - 11, doi: 10.1021/acsami.9b20907 (MAGNETRON, RIE-FLUORINE, VERIOS, LYRA, HELIOS, KRATOS-XPS)
Robl, J.; Sedlák, J.; Pokorný, Z.; Ňuksa, P.; Barényi, I.; Majerík, J., 2020: Analysis of advanced additive technology in direct metal laser sintering and precision casting method. BULLETIN OF THE POLISH ACADEMY OF SCIENCES: TECHNICAL SCIENCES 68 (1), p. 109 - 118, doi: 10.24425/bpasts.2020.131842 (LYRA, HELIOS, TITAN)
Mouralova, K.; Benes, L.; Prokes, T.; Bednar, J.; Zahradnicek, R.; Jankovych, R.; Fries, J.; Vontor, J., 2020: Analysis of the machinability of copper alloy ampcoloy by WEDM. MATERIALS 13 (4), p. 893-1 - 893-14, doi: 10.3390/ma13040893 (LYRA, ICON-SPM, HELIOS, TITAN)
Hren, I.; Michna, S.; Svobodova, J.; Michnova, L.; Benes, L., 2020: Analysis of the defects occurrence on the functional surfaces of individual mould segments for the tyre production from AlSi7Mg0.3Sr. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, p. 3474 - 10, doi: 10.1177/0954406220916479 (HELIOS, LYRA, TITAN, RIGAKU3)
Horák, M., 2020: Electron microscopy and spectroscopy in plasmonics. PH.D. THESIS, p. 1 - 129 (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)
CASAS LUNA, M.; TORRES RODRÍGUEZ, J.; Valdés-Martínez, O. U.; Obradović, N.; SLÁMEČKA, K.; MACA, K.; KAISER, J.; MONTUFAR JIMENEZ, E.; ČELKO, L., 2020: Robocasting of controlled porous CaSiO3–SiO2 structures: Architecture – Strength relationship and material catalytic behavior. CERAMICS INTERNATIONAL 46 (7), p. 8853 - 9, doi: 10.1016/j.ceramint.2019.12.130 (RIGAKU3, LYRA)
DRDLÍKOVÁ, K.; KLEMENT, R.; DRDLÍK, D.; GALUSEK, D.; MACA, K., 2020: Processing and properties of luminescent Cr3+ doped transparent alumina ceramics. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 40 (7), p. 2573 - 8, doi: 10.1016/j.jeurceramsoc.2019.11.010 (LYRA)
LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326 (EVAPORATOR, LYRA, RIE-FLUORINE, MIRA-EBL, ICON-SPM)
Mouralova, K.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2020: Precision Machining of Nimonic C 263 Super AlloyUsing WEDM. COATINGS, MDPI 10 (6), p. 590-1 - 590-20, doi: 10.3390/coatings10060590 (LYRA, TITAN, DEKTAK, HELIOS)
SOBOLA, D.; RAMAZANOV, S.; KONEČNÝ, M.; ORUDZHEV, F.; KASPAR, P.; PAPEŽ, N.; KNÁPEK, A.; POTOČEK, M., 2020: Complementary SEM-AFM of Swelling Bi-Fe-O Film on HOPG Substrate. MATERIALS 13 (10), p. 1 - 15, doi: 10.3390/ma13102402 (KRATOS-XPS, SIMS, WITEC-RAMAN, LYRA)
Mouralova, K.; Zahradnicek, R.; Benes, L.; Prokes, T.; Hrdy, R.; Fries, J., 2020: Study of micro structural material changes after WEDM based on TEM lamella analysis. METALS 10 (7), p. 949-1 - 949-17, doi: 10.3390/met10070949 (HELIOS, TITAN, LYRA)
Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M , 2020: Propagation of spin waves through a Neel domain wall. APPLIED PHYSICS LETTERS 117 (2), p. 022405-1 - 5, doi: 10.1063/5.0013692 (EVAPORATOR, KERR-MICROSCOPE, ICON-SPM, LYRA, BRILLOUIN, MIRA-EBL)
Que, Z.; Heczko, M.; Kuběna, I.; Seifert, H.P.; Spätig, P., 2020: Microstructural characterization of the synergic effects of dynamic strain ageing and hydrogen on fracture behaviour of low-alloy RPV steels in high-temperature water environments. MATERIALS CHARACTERIZATION 165, p. 110405-1 - 12, doi: 10.1016/j.matchar.2020.110405 (HELIOS, LYRA)
Čalkovský, V., 2020: Fabrication and characterization of GaN nanostuctures. TREATISE TO STATE DOCTORAL EXAM, p. 1 - 38 (VERIOS, KRATOS-XPS, LYRA, TITAN)
Remešová, M., 2020: Research and development of a technology of hard anodization of nonferrous alloys. PH.D. THESIS, p. 1 - 130 (RIGAKU3, LYRA, LEICACOAT-STAN, HELIOS, TITAN)
Mouralova, K.; Benes, L.; Prokes, T.; Bednar, J.; Zahradnicek, R.; Fries, J., 2020: Machining of pure molybdenum using WEDM. MEASUREMENT, JOURNAL OF THE INTERNATIONAL MEASUREMENT CONFEDERATION (IMEKO) 163, p. 108010-1 - 108010-13, doi: 10.1016/j.measurement.2020.108010 (LYRA, RIGAKU3, ICON-SPM)
Tinoco, HA.; Cardona, CI.; Marin-Berrio, MLF.; Garcia-Grisales, J.; Gomez, JP.; Roldan, SI.; Pena, FM.; Brinek, A.; Kalasova, D.; Kaiser, J.; Zikmund, T., 2020: Bio-structural monitoring of bone mineral alterations through electromechanical impedance measurements of a Piezo-device joined to a tooth. BIOMEDICAL ENGINEERING LETTERS, p. 603 - 15, doi: 10.1007/s13534-020-00170-9 (micro-CT-L240, LYRA)
REMEŠOVÁ, M.; TKACHENKO, S.; KVARDA, D.; ROČŇÁKOVÁ, I.; GOLLAS, B.; MENELAOU, M.; ČELKO, L.; KAISER, J., 2020: Effects of anodizing conditions and the addition of Al2O3/PTFE particles on the microstructure and the mechanical properties of porous anodic coatings on the AA1050 aluminium alloy. APPLIED SURFACE SCIENCE, p. 1 - 10, doi: 10.1016/j.apsusc.2020.145780 (LYRA, LEICACOAT-NANO)
SLÁMEČKA, K.; JECH, D.; KLAKURKOVÁ, L.; TKACHENKO, S.; REMEŠOVÁ, M.; GEJDOŠ, P.; ČELKO, L., 2020: Thermal cycling damage in pre-oxidized plasma-sprayed MCrAlY plus YSZ thermal barrier coatings: Phenomenon of multiple parallel delamination of the TGO layer. SURFACE AND COATINGS TECHNOLOGY 384, p. 1 - 13, doi: 10.1016/j.surfcoat.2019.125328 (LYRA)
Mouralova, K.; Benes, L.; Zahradnicek, R.; Bednar, J.; Zadera, A.; Fries, J.; Kana, V., 2020: WEDM used for machining high entropy alloys. MATERIALS 13 (21), p. 4823-1 - 4823-20, doi: 10.3390/ma13214823 (LYRA, DEKTAK, HELIOS, TITAN)
Mouralova, K.; Bednar, J.; Benes, L.; Hrabec, P.; Kalivoda, M.; Fries, J., 2020: The analysis of EDM electrodes wear in corners and edges. ARCHIVES OF CIVIL AND MECHANICAL ENGINEERING 20 (4), p. 130-1 - 130-14, doi: 10.1007/s43452-020-00137-8 (LYRA, DEKTAK)
Papez, N; Gajdos, A; Sobola, D; Dallaev, R; Macku, R; Skarvada, P; Grmela, L, 2020: Effect of gamma radiation on properties and performance of GaAs based solar cells. APPLIED SURFACE SCIENCE 527, p. 146766-1 - 146766-11, doi: 10.1016/j.apsusc.2020.146766 (LYRA, WOOLLAM-VIS, SIMS, FTIR, WITEC-RAMAN)
Knapek, A; Dallaev, R; Burda, D; Sobola, D; Allaham, MM; Horacek, M; Kaspar, P; Matejka, M; Mousa, MS, 2020: Field Emission Properties of Polymer Graphite Tips Prepared by Membrane Electrochemical Etching. NANOMATERIALS 10 (7), p. 1294-1 - 1294-12, doi: 10.3390/nano10071294 (WITEC-RAMAN, LYRA)
FLAJŠMAN, L.; WAGNER, K.; VAŇATKA, M.; GLOSS, J.; KŘIŽÁKOVÁ, V.; SCHMID, M.; URBÁNEK, M.; SCHULTHEISS, H., 2020: Zero-field propagation of spin waves in waveguides prepared by focused ion beam direct writing. PHYSICAL REVIEW B 101 (1), p. 014436-1 - 7, doi: 10.1103/PhysRevB.101.014436 (KERR-MICROSCOPE, LYRA)
Habovštiaková, M., 2020: Electroerosion wire cutting of technical ceramics. MASTER'S THESIS, p. 1 - 83 (LYRA, DEKTAK)
Kudrna, T., 2020: Electroerosive sinking of technical ceramics. MASTER'S THESIS, p. 1 - 88 (LYRA, DEKTAK)
Zubáková, A., 2020: Electroerosion machining of materials used in the aerospace industry. MASTER'S THESIS, p. 1 - 62 (LYRA, DEKTAK)
Líkař, M., 2020: Experimental electroerosion machining of special materials for aerospace industry. MASTER'S THESIS, p. 1 - 62 (DEKTAK, LYRA)
Macháčová, V., 2020: Analysis of results from experimental electrodischarge sinking of special materials for aerospace industry. MATER'S THESIS, p. 1 - 64 (DEKTAK, LYRA)
Robl, J., 2020: Application of Metal Additive Technology in Production of a Blisk for Turbine Engine of a Auxiliary Power Unit. MASTER'S THESIS, p. 1 - 81 (LYRA)
Vontor, J., 2020: Analysis of defects of copper alloy after wire electrical discharge machining. MASTER'S THESIS, p. 1 - 56 (LYRA, HELIOS, TITAN)
CASAS LUNA, M.; RAVASZOVÁ, S.; SKALKA, P.; GEJDOŠ, P.; JECH, D.; SLÁMEČKA, K.; KAISER, J.; DVOŘÁK, K.; ČELKO, L., 2020: Thermal cycling effect on the phase stability and fracture resistance of synthetic barium/magnesium aluminosilicate systems. CERAMICS INTERNATIONAL 46 (15), p. 24129 - 24136, doi: 10.1016/j.ceramint.2020.06.192 (LYRA)
KUPKA, V.; DVOŘÁKOVÁ, E.; MANAKHOV, A.; MICHLÍČEK, M.; PETRUŠ, J.; VOJTOVÁ, L.; ZAJÍČKOVÁ, L., 2020: Well-Blended PCL/PEO Electrospun Nanofibers with Functional Properties Enhanced by Plasma Processing. POLYMERS 12 (6), p. 1 - 16, doi: 10.3390/polym12061403 (LYRA, KRATOS-XPS, R2-PECVD)
LIU, X.; FECKO, P.; FOHLEROVÁ, Z.; PEKÁREK, J.; KARÁSEK, T.; NEUŽIL, P., 2020: Parylene Micropillars Coated with Thermally Grown SiO2. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 38 (6), p. 38 - 6, doi: 10.1116/6.0000558 (SUSS-MA8, SUSS-RCD8, DWL, DRIE, RIE-FLUORINE, PARYLENE-SCS, XEF2, APCVD, LYRA)
MONTUFAR JIMENEZ, E.; TKACHENKO, S.; CASAS LUNA, M.; ŠKARVADA, P.; SLÁMEČKA, K.; DÍAZ DE LA TORRE, S.; KOUTNÝ, D.; PALOUŠEK, D.; KOLEDOVÁ, Z.; HERNÁNDEZ-TAPIA, L.; ZIKMUND, T.; ČELKO, L.; KAISER, J., 2020: Benchmarking of additive manufacturing technologies for commercially-pure-titanium bone-tissue-engineering scaffolds: processing-microstructure-property relationship. ADDITIVE MANUFACTURING, p. 1 - 13, doi: 10.1016/j.addma.2020.101516 (LEICACOAT-STAN, LYRA, RIGAKU3, micro-CT-L240)
NĚMČÁKOVÁ, I.; BLAHOVÁ, L.; RYŠÁNEK, P.; BLANQUER, A.; BAČÁKOVÁ, L.; ZAJÍČKOVÁ, L., 2020: Behaviour of Vascular Smooth Muscle Cells on Amine Plasma-Coated Materials with Various Chemical Structures and Morphologies. INTERNATIONAL JOURNAL OF MOLECULAR SCIENCES 21 (24), p. 1 - 24, doi: 10.3390/ijms21249467 (KRATOS-XPS, LYRA, LEICACOAT-STAN, R2-PECVD)
Casas Luna, M., 2020: Structure and properties of Hydroxyapatite-Magnesium composites produced by the means of current assisted infiltration sintering. PH.D. THESIS, p. 1 - 128 (LYRA, RIGAKU3, micro-CT-L240)
Flajšman, L., 2020: Magneto-optical study of the dynamic properties of magnetic nanostructures and nanostructured metamaterials. PH.D. THESIS, p. 1 - 152 (LYRA, KERR-MICROSCOPE, BRILLOUIN)
STÖGER-POLLACH, M.; BUKVIŠOVÁ, K.; SCHWARZ, S.; KVAPIL, M.; ŠAMOŘIL, T.; HORÁK, M., 2019: Fundamentals of cathodoluminescence in a STEM: The impact of sample geometry and electron beam energy on light emission of semiconductors. ULTRAMICROSCOPY 200, p. 111 - 14, doi: 10.1016/j.ultramic.2019.03.001 (HELIOS, LYRA)
ČELKO, L.; MENELAOU, M.; CASAS LUNA, M.; HORYNOVÁ, M.; MUSÁLEK, T.; REMEŠOVÁ, M.; DÍAZ DE LA TORRE, S.; MORSI, K.; KAISER, J., 2019: Spark Plasma Extrusion and the Thermal Barrier Concept. METALLURGICAL AND MATERIALS TRANSACTIONS B-PROCESS METALLURGY AND MATERIALS PROCESSING SCIENCE 50 (2), p. 656 - 10, doi: 10.1007/s11663-018-1493-3 (LYRA)
ROLEČEK, J.; PEJCHALOVÁ, L.; MARTÍNEZ-VÁZQUEZ, F.; MIRANDA GONZÁLEZ, P.; SALAMON, D., 2019: Bioceramic scaffolds fabrication: indirect 3D printing combined with ice-templating vs. robocasting. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 39 (4), p. 1595 - 8, doi: 10.1016/j.jeurceramsoc.2018.12.006 (RIGAKU3, LYRA)
Michlíček, M.; Manakhov, A.; Dvořáková, E.; Zajíčková, L., 2019: Homogeneity and penetration depth of atmospheric pressure plasma polymerization onto electrospun nanofibrous mats. APPLIED SURFACE SCIENCE 471, p. 835 - 841, doi: 10.1016/j.apsusc.2018.11.148 (LYRA, MAGNETRON, FTIR, KRATOS-XPS)
HORÁK, M.; KŘÁPEK, V.; HRTOŇ, M.; KONEČNÁ, A.; LIGMAJER, F.; STÖGER-POLLACH, M.; ŠAMOŘIL, T.; PATÁK, A.; ÉDES, Z.; METELKA, O.; BABOCKÝ, J.; ŠIKOLA, T., 2019: Limits of Babinet’s principle for solid and hollow plasmonic antennas. SCIENTIFIC REPORTS 9, p. 1 - 11, doi: 10.1038/s41598-019-40500-1 (FTIR, HELIOS, LYRA, MAGNETRON, TITAN)
GLOSS, J.; HORKÝ, M.; KŘIŽÁKOVÁ, V.; FLAJŠMAN, L.; SCHMID, M.; URBÁNEK, M.; VARGA, P., 2019: The growth of metastable fcc Fe78Ni22 thin films on H-Si(100) substrates suitable for focused ion beam direct magnetic patterning. APPLIED SURFACE SCIENCE 469, p. 747 - 6, doi: 10.1016/j.apsusc.2018.10.263 (ICON-SPM, KERR-MICROSCOPE, LYRA, UHV-XPS)
NOVOTNÁ, L.; KUČERA, L.; HAMPL, A.; DRDLÍK, D.; CIHLÁŘ, J.; CIHLÁŘ, J., 2019: Biphasic calcium phosphate scaffolds with controlled pore size distribution prepared by in-situ foaming. MATERIALS SCIENCE AND ENGINEERING C-MATERIALS FOR BIOLOGICAL APPLICATIONS 95, p. 363 - 8, doi: 10.1016/j.msec.2018.03.022 (LYRA, RIGAKU3)
Mouralova, K.; Prokes, T.; Benes, L., 2019: Surface and Subsurface Layers Defects Analysis After WEDM Affecting the Subsequent Lifetime of Produced Components. ARABIAN JOURNAL FOR SCIENCE AND ENGINEERING 44 (9), p. 7723 - 7735, doi: 10.1007/s13369-019-03887-7 (LYRA, ICON-SPM)
Vacek, P.; Kostelník, P.; Gröger, R., 2019: Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films. PHYSICA STATUS SOLIDI B 256 (11), p. 1900279-1 - 1900279-7, doi: 10.1002/pssb.201900279 (LYRA, HELIOS, ICON-SPM)
Fecko, P., 2019: Gecko mimicking surfaces. MASTER'S THESIS, p. 1 - 52 (SUSS-RCD8, SUSS-MA8, DWL, DRIE, LYRA, ALD-FIJI, RIE-FLUORINE, ICON-SPM, PARYLENE-SCS, XEF2)
Krajňák, T., 2019: Deposition of large organic molecules under UHV. MASTER'S THESIS, p. 1 - 58 (LYRA, VERIOS, KRATOS-XPS)
Mouralova, K.; Prokes, T.; Benes, L.; Sliwkova, P., 2019: Analysis of subsurface defects occurrence in abrasion resistant Creusabro steel after WEDM including the study of morphology and surface topography. MACHINING SCIENCE AND TECHNOLOGY, p. 1 - 17, doi: 10.1080/10910344.2019.1669166 (LYRA)
MACH, J.; PIASTEK, J.; MANIŠ, J.; ČALKOVSKÝ, V.; ŠAMOŘIL, T.; FLAJŠMANOVÁ, J.; BARTOŠÍK, M.; VOBORNÝ, S.; KONEČNÝ, M.; ŠIKOLA, T., 2019: Low temperature selective growth of GaN single crystals on pre-patterned Si substrates. APPLIED SURFACE SCIENCE 497, p. 1 - 7, doi: 10.1016/j.apsusc.2019.143705 (LYRA, WITEC-RAMAN)
CASAS LUNA, M.; TAN, H.; TKACHENKO, S.; SALAMON, D.; MONTUFAR JIMENEZ, E., 2019: Enhancement of mechanical properties of 3D-plotted tricalcium phosphate scaffolds by rapid sintering. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 39 (14), p. 4366 - 9, doi: 10.1016/j.jeurceramsoc.2019.05.055 (RIGAKU3, LYRA)
Zábranský, L.; Souček, P.; Vašina, P.; Dugáček, J.; Sťahel, P.; Buršík, J.; Svoboda, M.; Mikšová, R.; Peřina, V.; Balázsi, K.; Czigány, Z.; Buršíková, V., 2019: Microstructural changes of amorphous Mo–B–C coatings upon thermal annealing. SURFACE AND COATINGS TECHNOLOGY 379, p. 125052-1 - 125052-7, doi: 10.1016/j.surfcoat.2019.125052 (RIGAKU9, LYRA, TITAN)
Mouralova, K.; Benes, L.; Zahradnicek, R.; Bednar, J.; Hrabec, P.; Prokes, T., Hrdy, R., 2019: Analysis of cut orientation through half-finished product using WEDM. MATERIALS AND MANUFACTURING PROCESSES 34 (1), p. 70 - 82, doi: 10.1080/10426914.2018.1544714 (LYRA, HELIOS, TITAN)
Mouralova K., Benes L., Bednar J., Zahradnicek R., Prokes T., Matousek R., Hrabec P., Fiserova Z., Otoupalik J., 2019: Using a DoE for a comprehensive analysis of the surface quality and cutting speed in WED-machined hadfield steel. JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY 33 (5), p. 2371 - 2386, doi: 10.1007/s12206-019-0437-4 (LYRA, TITAN, NANOINDENTER, HELIOS)
Mazanova, V; Heczko, M; Skorik, V; Chlupova, A; Polak, J; Kruml, T, 2019: Microstructure and martensitic transformation in 316L austenitic steel during multiaxial low cycle fatigue at room temperature. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 767, p. 138407-1 - 138407-14, doi: 10.1016/j.msea.2019.138407 (LYRA)
Mouralova, K.; Benes, L.; Prokes, T.; Zahradnicek, R.; Bednar, J.; Otoupalik, J.; Fiserova, Z.; Fiala, Z., 2019: Micro-milling machinability of pure molybdenum. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 102 (9-12), p. 4153 - 4165, doi: 10.1007/s00170-019-03524-5 (LYRA, HELIOS, TITAN, RIGAKU9, ICON-SPM)
DYČKA, M.; DYČKOVÁ, L.; GEJDOŠ, P.; JULIŠ, M., 2019: Microstructural study of AZ91C magnesium alloy castings produced by investment casting in as-cast state and after heat treatment. METAL 2019 - 28TH INTERNATIONAL CONFERENCE ON METALLURGY AND MATERIALS, p. 1457 - 6 (LYRA)
Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER'S THESIS, p. 1 - 64 (LYRA, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER)
Mouralova, K.; Prokes, T.; Benes, L.; Bednar, J., 2019: The Influence of WEDM Parameters Setup on the Occurrence of Defects When Machining Hardox 400 Steel. MATERIALS 12 (22), p. 3758-1 - 3758-15, doi: 10.3390/ma12223758 (LYRA, ICON-SPM, HELIOS, TITAN)
Novotný, O., 2019: Mechanical excitation of self sensing SPM probes. BACHELOR'S THESIS, p. 1 - 53 (LYRA)
PRAJZLER, V.; SALAMON, D.; MACA, K., 2018: Pressure-less rapid rate sintering of pre-sintered alumina and zirconia ceramics. CERAMICS INTERNATIONAL 44 (9), p. 10840 - 7, doi: 10.1016/j.ceramint.2018.03.132 (LYRA)
TKACHENKO, S.; HORYNOVÁ, M.; CASAS LUNA, M.; DÍAZ DE LA TORRE, S.; DVOŘÁK, K.; ČELKO, L.; KAISER, J.; MONTUFAR JIMENEZ, E., 2018: Strength and fracture mechanism of iron reinforced tricalcium phosphate cermet fabricated by spark plasma sintering. JOURNAL OF THE MECHANICAL BEHAVIOR OF BIOMEDICAL MATERIALS 81, p. 16 - 10, doi: 10.1016/j.jmbbm.2018.02.016 (LYRA, RIGAKU3)
Bělka, M., 2018: In vitro study of the effect of particle characteristics and flow rate on regional deposition in human airways. PH.D. THESIS, p. 1 - 121 (LYRA)
Rudolfová, Z., 2018: Creation of nanostructures on surfaces of solid matter using hybrid methods. PH.D. THESIS, p. 1 - 75 (LYRA)
DRDLÍK, D.; ROLEČEK, J.; DRDLÍKOVÁ, K.; SALAMON, D., 2018: Restraining of calcium contamination in near-net shape alumina ceramics during slip casting. INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY 15 (6), p. 1559 - 8, doi: 10.1111/ijac.13042 (LYRA, SIMS)
TKACHENKO, S.; DVOŘÁK, K.; JECH, D.; SLÁMEČKA, K.; KLAKURKOVÁ, L.; PALOUŠEK, D.; ČELKO, L., 2018: Wear of grinding rotors with thermally-sprayed coatings in a high-speed mill. WEAR 412-413, p. 49 - 11, doi: 10.1016/j.wear.2018.05.016 (LYRA, RIGAKU3)
MOURALOVÁ, K.; KLAKURKOVÁ, L.; MATOUŠEK, R.; PROKEŠ, T.; HRDÝ, R.; KAŇA, V., 2018: Influence of the Cut Direction through the Semi-Finished Product on the Occurrence of Cracks for X210Cr12 Steel Using WEDM. ARCH CIV MECH ENG 18 (4), p. 1318 - 14, doi: 10.1016/j.acme.2018.04.004 (LYRA)
Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER'S THESIS, p. 1 - 83 (LYRA, HELIOS, KERR-MICROSCOPE, ICON-SPM, MIRA-EBL, EVAPORATOR, WIRE-BONDER)
Dvořák, P., 2018: Nanophotonics. PH.D. THESIS, p. 1 - 134 (LYRA, EVAPORATOR, FTIR, WOOLLAM-VIS)
DVOŘÁK, P.; KVAPIL, M.; BOUCHAL, P.; ÉDES, Z.; ŠAMOŘIL, T.; HRTOŇ, M.; LIGMAJER, F.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Near-field digital holography: a tool for plasmon phase imaging. NANOSCALE 10 (45), p. 21363 - 7, doi: 10.1039/c8nr07438k (LYRA)
Motyčková, L., 2018: Epitaxial growth and characterization of metamagnetic nanoparticles for biomedical applications. BACHELOR'S THESIS, p. 1 - 55 (MAGNETRON, ICON-SPM, LYRA, CRYOGENIC)
Mouralova, K.; Benes, L.; Zahradnicek, R.; Bednar, J.; Hrabec, P.; Prokes, T.; Matousek, R.; Fiala, Z., 2018: Quality of surface and subsurface layers after WEDM aluminum alloy 7475-T7351 including analysis of TEM lamella. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 99 (9-12), p. 2309 - 2326, doi: 10.1007/s00170-018-2626-1 (LYRA, ICON-SPM, HELIOS, TITAN, NANOINDENTER)
BŘÍNEK, L.; KVAPIL, M.; ŠAMOŘIL, T.; HRTOŇ, M.; KALOUSEK, R.; KŘÁPEK, V.; SPOUSTA, J.; DUB, P.; VARGA, P.; ŠIKOLA, T., 2018: Plasmon Resonances of Mid-IR Antennas on Absorbing Substrate: Optimization of Localized Plasmon-Enhanced Absorption upon Strong Coupling Effect. ACS PHOTONICS 5 (11), p. 4378 - 8, doi: 10.1021/acsphotonics.8b00806 (LYRA, FTIR)
Kaushik, P.; Elias, M.; Prasek, J.; Pytlicek, Z.; Zajickova, L., 2018: Titanium dioxide modified multi-walled carbon nanotubes as room temperature NH3 gas sensors. ELECTRONICS TECHNOLOGY (ISSE), p. 959 - 961 (ALD-FIJI, LYRA)
Jemelka, M., 2017: Microstructure Revealing and Analysis of Partially Sintered Oxide Ceramic Materials. BACHELOR'S THESIS, p. 1 - 52 (LYRA)
Hegrová, V., 2017: Fabrication and application of graphene-metal heterostructures in biosensing by surface enhanced Raman spectroscopy. BACHELOR'S THESIS, p. 1 - 37 (LYRA, ICON-SPM)
PAPEŽ, N.; SOBOLA, D.; ŠKARVADA, P.; ŠKVARENINA, Ľ.; HEMZAL, D.; TOFEL, P.; GRMELA, L., 2017: Degradation analysis of GaAs solar cells at thermal stress. APPLIED SURFACE SCIENCE 461, p. 105 - 1, doi: 10.1016/j.apsusc.2018.05.093 (LYRA)
Horký, M., 2016: Growth of Metastable FCC FE Thin Films on Cu(100)/Si(100) Substrates. MASTER'S THESIS, p. 1 - 96 (UHV-XPS, UHV-SPM, ICON-SPM, LYRA, VERIOS, UHV-LEIS, KRATOS-XPS, RIGAKU3)
Musálek, T., 2016: Semiconductor nanowire growth utilizing alloyed catalyst. MASTER’S THESIS, p. 1 - 52 (VERIOS, LYRA, MIRA-EBL, ALD-FIJI)
Andrýsek, M., 2016: Preparation of surfaces with diffusion barrier for studying initial phase of semiconductor nanowire growth. BACHELOR’S THESIS, p. 1 - 22 (LYRA, VERIOS, ALD-FIJI)
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS, p. 1 - 54 (PECVD, MIRA-EBL, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)