DIENER Parylene coating system
Parylene coating is used to coat surfaces with a thin, transparent parylene film. The coating is used in electronics, aviation and aerospace, sensor technology, medical/pharmaceutical, industrial, and automotive engineering applications. This parylene coating system can be used for the deposition of parylene N, parylene C, parylene D, and parylene F-VT4. Depending on the parylene type, layer thicknesses of 0.05 to 20 micrometres can be achieved. In parylene coating, dimers are vaporized in a vacuum. In the next stage, the dimers are thermally split into monomers on the hot walls of the pyrolysis tube. The monomers then polymerize primarily in the colder areas of the chamber and on the sample surfaces. This is a very gentle process, with virtually no increase in substrate surface temperature.
Specification
DIENER PARYLENE key features
| Substrates/Capacity | up to ⌀125mm 6x wafers (levels) or small samples of similar area |
|---|---|
| Thicknesses | from 100's of nm up to 15 µm per run |
| Available dimers | Parylene C - available |
| Parylene types N and D - on request | |
| Deposition rate | Depositions last from 1h until several hours depending on the dimer mass |
| Deposition temperature | Ambient (max 30°C) |
| Adhesion | A174 silane for increased polished surface adhesion |
Advanced
- Cold trap temperature: Liquid Nitrogen -196°C; needs to be refilled by hand every 2-3h
- Oil vacuum rotary pump
Gallery
Publications
MIGLIACCIO, L.; SAY, M.; PATHAK, G.; GABLECH, I.; BRODSKÝ, J.; DONAHUE, M.; GLOWACKI, E., 2025: Ultrathin Indium Tin Oxide Accumulation Mode Electrolyte-Gated Transistors for Bioelectronics. ADVANCED MATERIALS TECHNOLOGIES, p. 2302219 - 9, doi: 10.1002/admt.202302219 (SUSS-MA8, RIE-FLUORINE, PARYLENE-DIENER, KEITHLEY-4200)