Channels in silicon technology

Details

Type of access
Regular service
Research area
Devices
Topic
Microfluidics
Guarantor
Hubálek, Jaromír
Equipment
Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100
UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
Resist stripper Diener electronic NANO Plasma cleaner
SCS Parylene Deposition System