SCS Parylene Deposition System
For Parylene laboratory research, applications developement and testing, the SCS Labcoater 2 Parylene Deposition System (PDS 2010) performs reliable and repeatable application of SCS Parylene conformal coatings. Parylene conformal coatings are ultra-thin, pinhole-free polymer coatings that provide a number of high-value surface treatment properties such as excellent moisture, chemical and dielectric barrier properties, thermal and UV stability, and dry-film lubricity. These properties make SCS Parylene coatings the ideal choice for a number of applications throughout the medical device, electronics, automotive, military and aerospace industries
Specification
Methods
Application of SCS Parylene conformal coatingsPARYLENE SCS LABOCTER 2010 key features
| Substrates/Capacity | up to ⌀150 mm single wafer or 3x ⌀100mm wafer |
|---|---|
| Thicknesses | from 100's of nm up to 15 µm per run |
| Available dimers | Parylene C - available |
| Parylene types N and D - on request | |
| Deposition rate | Depositions last from 2h until several hours ("overnight") depending on the dimer mass |
| Deposition temperature | Ambient (max 30°C) |
| Adhesion | A174 silane for increased polished surface adhesion |
Advanced
- Cold trap temperature: -75°C
- Oil vacuum pump
Publications
SLAVÍK, J.; ČMIEL, V.; HUBÁLEK, J.; YANG, Y.; REN, T.-L., 2021: Hippocampal Neurons’ Alignment on Quartz Grooves and Parylene Cues on Quartz Substrate. APPLIED SCIENCES-BASEL 11 (1), p. 1 - 12, doi: 10.3390/app11010275 (PARYLENE-SCS, RIE-FLUORINE)
LIU, X.; FECKO, P.; FOHLEROVÁ, Z.; PEKÁREK, J.; KARÁSEK, T.; NEUŽIL, P., 2020: Parylene Micropillars Coated with Thermally Grown SiO2. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 38 (6), p. 38 - 6, doi: 10.1116/6.0000558 (SUSS-MA8, SUSS-RCD8, DWL, DRIE, RIE-FLUORINE, PARYLENE-SCS, XEF2, APCVD, LYRA)
Fecko, P., 2019: Gecko mimicking surfaces. MASTER'S THESIS, p. 1 - 52 (SUSS-RCD8, SUSS-MA8, DWL, DRIE, LYRA, ALD-FIJI, RIE-FLUORINE, ICON-SPM, PARYLENE-SCS, XEF2)
GABLECH, I.; SOMER, J.; FOHLEROVÁ, Z.; SVATOŠ, V.; PEKÁREK, J.; KURDÍK, S.; FENG, J.; FECKO, P.; PODEŠVA, P.; HUBÁLEK, J.; NEUŽIL, P., 2018: Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating. MICROFLUIDICS AND NANOFLUIDICS 22 (9), p. NA - 7, doi: 10.1007/s10404-018-2125-6 (DRIE, DWL, SUSS-MA8, PARYLENE-SCS, XEF2)