NanoScan VLS-80
The VLS-80 is a new high vacuum scanning probe microscope developed by NanoScan in Switzerland. The VLS-80 combines uniquely high vacuum SPM performance with high precision sample navigation. Measurements can be conducted in-plane (<200mT) or out-of-plane magnetic field (<550mT). All standard AFM modes are available, An upgrade for Scanning Thermal Microscopy, Conductive AFM, and Scanning Spreading Resistance Microscopy is possible.
Specification
| Scanner | Range 80 × 80 × 10 μm3 |
|---|---|
| Sample | Size – up to 100 × 100 × 15 mm3 Weight – up to 300 g |
| Resolution | Topography – able to reach atomic resolution MFM ≥ 10 nm |
| Detection | Optical beam deflection |
| Stage | Motorized 20-mm accuracy |
| High vacuum | < 5·10-4 Pa up to 24-hour quiet pump operation |
| Magnetic field | In-plane field – variable up to ±200 mT optional sample rotation Out-of-plane field – variable up to ±550 mT |
Publications
Kovařík, M., 2025: Fabrication of functional nanostructures and their analysis by surface-sensitive techniques. PH.D. THESIS, p. 1 - 104 (NANOSCAN)
ZHANG, T.; HOLZER, J.; VYSTAVĚL, T.; KOLÍBAL, M.; PAIVA DE ARAÚJO, E.; STEPHENS, C.; BEN BRITTON, T., 2025: Characterization of WSe2 Films Using Reflection Kikuchi Diffraction in the Scanning Electron Microscope and Multivariate Statistical Analyses. ACS NANO 19 (44), p. 38360 - 38370, doi: 10.1021/acsnano.5c10753 (MPS150, NANOSCAN, WITEC-RAMAN)
KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines. ACS APPLIED ELECTRONIC MATERIALS 6 (12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450 (ALD-FIJI, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, WITEC-RAMAN, WIRE-BONDER, NANOSCAN)