Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
SEM is a type of microscope where a focused beam of electrons is scanned over the sample to generate an image or to modify the sample surface in nanometric resolution (usually better than 10 nm). The sample image is generated by detecting secondary and backscattered electrons emitted from the impact location of the beam. The tool is preferred for e-beam lithography, where the resist-coated sample is selectively exposed to the electron beam, allowing the preparation of very small patterns (< 50 nm and less) in the resistant surface. There can be further processing of the sample by wet chemistry (development, stripping). An interferometric stage can also be used to achieve ultimate resolution of electron beam lithography over a large area and to join more fields together.
Specification
Methods
sub-50 nm e-beam lithographyFeatures
- Scanning Electron Microscope with Schottky cathode for high-resolution/highcurrent/low-noise imaging
- Laser-based interferometric closed-loop XYZ stage with nanometric resolution and accuracy and repeatability in the other of tens of nanometers
| Lithography system Raith Elphy Plus | |
|---|---|
| Proximity effect correction software | |
| Active anti-vibration suspension system | |
| Sample size | up to 2" wafer size |
| Chamber vacuum | < 9e-3 Pa (< 5e-4 Pa reachable) |
Scanning Electron Microscope (SEM)
| Tescan Mira 3 | FEG |
|---|---|
| Accelerating voltage | 200 V – 30 kV |
| Probe current | 2 pA – 200 nA |
| View field | > 6 mm x 6 mm at WD 9 mm |
| Magnification | 1× – 1 000 000× |
| Detectors (resolution) | Secondary Electron (SE) detector (1.2 nm at 30 kV) |
| In-Beam SE detector (1.0 nm at 30 kV) |
Laser Interferometry Stage (LIS) Closed loop
| Patterning area | 45 mm x 45 mm (x 25 mm) |
|---|---|
| Resolution | 2 nm |
| Stitching accuracy | <= 100 nm |
| Overlay accuracy | <= 100 nm |
| Raith Elphy Plus |
Gallery
Publications
Kepič, P., 2021: Design and fabrication of tunable dielectric metasurfaces for visible and infrared wavelengths. MASTER'S THESIS, p. 1 - 76 (MIRA-EBL, EVAPORATOR, ICON-SPM, DEKTAK, LYRA, WITEC-RAMAN, KRATOS-XPS)
Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS, p. 1 - 100 (KERR-MICROSCOPE, ICON-SPM, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD-FIJI, WIRE-BONDER, SUSS-RCD8)
KEPIČ, P.; LIGMAJER, F.; HRTOŇ, M.; REN, H.; MENEZES, L.; MAIER, S.; ŠIKOLA, T., 2021: Optically Tunable Mie Resonance VO2 Nanoantennas for Metasurfaces in the Visible. ACS PHOTONICS 8 (4), p. 1048 - 10, doi: 10.1021/acsphotonics.1c00222 (EVAPORATOR, MIRA-EBL, WITEC-RAMAN, WOOLLAM-VIS)
Hajduček, J., 2021: Imaging of metamagnetic thin films using TEM. MASTER'S THESIS, p. 1 - 78 (MAGNETRON, VERSALAB, MIRA-EBL, HELIOS, TITAN)
USSIA, M.; URSO, M.; DOLEŽELÍKOVÁ, K.; MICHÁLKOVÁ, H.; ADAM, V.; PUMERA, M., 2021: Active Light-powered antibiofilm ZnO micromotors with chemically programmable properties. ADVANCED FUNCTIONAL MATERIALS 31 (27), p. 1 - 10, doi: 10.1002/adfm.202101178 (MIRA-EBL, RIGAKU9, KRATOS-XPS)
Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS, p. 1 - 113 (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
Horák, M., 2020: Electron microscopy and spectroscopy in plasmonics. PH.D. THESIS, p. 1 - 129 (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)
Wojewoda, O., 2020: Phase-resolved Brillouin light scattering: development and applications. MASTER'S THESIS (ICON-SPM, BRILLOUIN, EVAPORATOR, LYRA, MIRA-EBL, KERR-MICROSCOPE)
Babocký, J., 2020: Fabrication and characterization of nanostructures with functional properties in the field of plasmonics. PH.D. THESIS, p. 1 - 104 (MIRA-EBL, RAITH, EVAPORATOR, ICON-SPM)
Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER'S THESIS, p. 1 - 57 (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD-FIJI)
Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M , 2020: Propagation of spin waves through a Neel domain wall. APPLIED PHYSICS LETTERS 117 (2), p. 022405-1 - 5, doi: 10.1063/5.0013692 (EVAPORATOR, KERR-MICROSCOPE, ICON-SPM, LYRA, BRILLOUIN, MIRA-EBL)
LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326 (EVAPORATOR, LYRA, RIE-FLUORINE, MIRA-EBL, ICON-SPM)
KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T., 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9 (3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326 (HELIOS, MIRA-EBL, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER'S THESIS, p. 1 - 50 (MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER'S THESIS, p. 1 - 64 (LYRA, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER)
Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR'S THESIS, p. 1 - 46 (MAGNETRON, ICON-SPM, CRYOGENIC, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB)
BOUCHAL, P.; DVOŘÁK, P.; BABOCKÝ, J.; BOUCHAL, Z.; LIGMAJER, F.; HRTOŇ, M.; KŘÁPEK, V.; FAßBENDER, A.; LINDEN, S.; CHMELÍK, R.; ŠIKOLA, T., 2019: High-Resolution Quantitative Phase Imaging of Plasmonic Metasurfaces with Sensitivity down to a Single Nanoantenna. NANO LETTERS 19 (2), p. 1242 - 9, doi: 10.1021/acs.nanolett.8b04776 (EVAPORATOR, MIRA-EBL, VERIOS)
Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER'S THESIS, p. 1 - 55 (MAGNETRON, MIRA-EBL, RAITH, ICON-SPM, CRYOGENIC, VERSALAB)
HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8 (1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1 (TITAN, HELIOS, MIRA-EBL, EVAPORATOR, ICON-SPM)
Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS, p. 1 - 45 (MIRA-EBL, EVAPORATOR, FTIR)
Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER'S THESIS, p. 1 - 83 (LYRA, HELIOS, KERR-MICROSCOPE, ICON-SPM, MIRA-EBL, EVAPORATOR, WIRE-BONDER)
DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817 (MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)
Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS, p. 1 - 139 (ALD-FIJI, DIENER, EVAPORATOR, MIRA-EBL, PECVD, WIRE-BONDER)
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS, p. 1 - 54 (PECVD, MIRA-EBL, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)
Musálek, T., 2016: Semiconductor nanowire growth utilizing alloyed catalyst. MASTER’S THESIS, p. 1 - 52 (VERIOS, LYRA, MIRA-EBL, ALD-FIJI)