Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
SEM is a type of microscope where a focused beam of electrons is scanned over the sample to generate an image or to modify the sample surface in nanometric resolution (usually better than 10 nm). The sample image is generated by detecting secondary and backscattered electrons emitted from the impact location of the beam. The tool is preferred for e-beam lithography, where the resist-coated sample is selectively exposed to the electron beam, allowing the preparation of very small patterns (< 50 nm and less) in the resistant surface. There can be further processing of the sample by wet chemistry (development, stripping). An interferometric stage can also be used to achieve ultimate resolution of electron beam lithography over a large area and to join more fields together.
Specification
Methods
sub-50 nm e-beam lithographyFeatures
- Scanning Electron Microscope with Schottky cathode for high-resolution/highcurrent/low-noise imaging
- Laser-based interferometric closed-loop XYZ stage with nanometric resolution and accuracy and repeatability in the other of tens of nanometers
| Lithography system Raith Elphy Plus | |
|---|---|
| Proximity effect correction software | |
| Active anti-vibration suspension system | |
| Sample size | up to 2" wafer size |
| Chamber vacuum | < 9e-3 Pa (< 5e-4 Pa reachable) |
Scanning Electron Microscope (SEM)
| Tescan Mira 3 | FEG |
|---|---|
| Accelerating voltage | 200 V – 30 kV |
| Probe current | 2 pA – 200 nA |
| View field | > 6 mm x 6 mm at WD 9 mm |
| Magnification | 1× – 1 000 000× |
| Detectors (resolution) | Secondary Electron (SE) detector (1.2 nm at 30 kV) |
| In-Beam SE detector (1.0 nm at 30 kV) |
Laser Interferometry Stage (LIS) Closed loop
| Patterning area | 45 mm x 45 mm (x 25 mm) |
|---|---|
| Resolution | 2 nm |
| Stitching accuracy | <= 100 nm |
| Overlay accuracy | <= 100 nm |
| Raith Elphy Plus |
Gallery
Publications
GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107 (12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144 (ALD-FIJI, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, ICON-SPM, WOOLLAM-MIR)
GALLINA, P.; KONEČNÁ, A.; LIŠKA, J.; IDROBO, J.; ŠIKOLA, T., 2023: Strongly Coupled Plasmon and Phonon Polaritons as Seen by Photon and Electron Probes. PHYSICAL REVIEW APPLIED 19 (2), p. 24042 - 11, doi: 10.1103/PhysRevApplied.19.024042 (MIRA-EBL, EVAPORATOR, FTIR)
ŠVARC, V.; BARTOŠÍK, M.; KONEČNÝ, M.; PIASTEK, J.; NEZVAL, D.; MACH, J.; ŠIKOLA, T., 2023: Side charge propagation in simultaneous KPFM and transport measurement of humidity exposed graphene FET sensor. CARBON 215, p. 118471 - 12, doi: 10.1016/j.carbon.2023.118471 (RIE-FLUORINE, EVAPORATOR, MIRA-EBL, WIRE-BONDER)
Kunc, J.; Morzhuk, B.; Shestopalov, M.; Fridrišek, T.; Dědič, V., 2023: Spectral current density and responsivity scaling for Fourier transform photocurrent spectroscopy. REVIEW OF SCIENTIFIC INSTRUMENTS 94 (5), doi: 10.1063/5.0139027 (RAITH, MIRA-EBL, EVAPORATOR, RIE-FLUORINE)
Klíma, J., 2023: Spin waves in non-trivial magnetic landscapes. BACHELOR'S THESIS, p. 1 - 69 (MIRA-EBL, LYRA, ICON-SPM, KERR-MICROSCOPE, BRILLOUIN, EVAPORATOR)
NOVCIC, K.; IFFELSBERGER, C.; PALACIOS CORELLA, M.; PUMERA, M., 2023: Solvents dramatically influence the atomic composition and catalytic properties of Ti3C2Tx MXenes. JOURNAL OF MATERIALS CHEMISTRY A 11 (25), p. 13419 - 13, doi: 10.1039/d3ta01441j (MIRA-EBL, KRATOS-XPS)
WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6 (1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD-FIJI, LYRA, ICON-SPM, BRILLOUIN)
BRODSKÝ, J.; GABLECH, I.; MIGLIACCIO, L.; HAVLÍČEK, M.; DONAHUE, M.; GLOWACKI, E., 2023: Downsizing the Channel Length of Vertical Organic Electrochemical Transistors. ACS APPL MATER INTER 15 (22), p. 27002 - 8, doi: 10.1021/acsami.3c02049 (SUSS-MA8, EVAPORATOR, SCIA, PARYLENE-SCS, RIE-FLUORINE, MIRA-EBL, DEKTAK, ICON-SPM)
Turčan, I., 2022: Magnetism in curved geometries. PH.D. THESIS, p. 1 - 117 (LYRA, BRILLOUIN, ICON-SPM, MIRA-EBL, KERR-MICROSCOPE, HELIOS)
MILOSAVLJEVIĆ, V.; KOŠARIŠŤANOVÁ, L.; DOLEŽELÍKOVÁ, K.; ADAM, V.; PUMERA, M., 2022: Microrobots with Antimicrobial Peptide Nanoarchitectonics for the Eradication of Antibiotic-Resistant Biofilms. ADVANCED MATERIALS FOR OPTICS AND ELECTRONICS 32 (43), p. 1 - 11, doi: 10.1002/adfm.202112935 (LEICACOAT-NANO, MIRA-EBL, MIRA-STAN, KRATOS-XPS)
Fridrišek, T., 2022: Optical gating of epitaxial graphene. MASTER'S THESIS (MIRA-EBL, RIE-FLUORINE, EVAPORATOR, LYRA, WIRE-BONDER)
Vodička, M., 2022: Fabrication and characterisation of plasmonic antennas on selected thin film with aim to get enhanced absorption due to presence of strong coupling. BACHELOR'S THESIS, p. 1 - 60 (MIRA-EBL, FTIR, EVAPORATOR, MPS150)
Děcký, M., 2022: Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas. BACHELOR'S THESIS, p. 1 - 44 (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)
Pejchal, T., 2021: Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis. PH.D. THESIS (NANOSAM, WITEC-RAMAN, VERIOS, KRATOS-XPS, HELIOS, TITAN, ALD-FIJI, EVAPORATOR, MIRA-EBL, MPS150)
Idesová, B., 2021: Plasmonically active nanostructures for optical filtering. BACHELOR'S THESIS, p. 1 - 47 (EVAPORATOR, MIRA-EBL, FTIR)
Hajduček, J., 2021: Imaging of metamagnetic thin films using TEM. MASTER'S THESIS, p. 1 - 78 (MAGNETRON, VERSALAB, MIRA-EBL, HELIOS, TITAN)
Kepič, P., 2021: Design and fabrication of tunable dielectric metasurfaces for visible and infrared wavelengths. MASTER'S THESIS, p. 1 - 76 (MIRA-EBL, EVAPORATOR, ICON-SPM, DEKTAK, LYRA, WITEC-RAMAN, KRATOS-XPS)
Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS, p. 1 - 100 (KERR-MICROSCOPE, ICON-SPM, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD-FIJI, WIRE-BONDER, SUSS-RCD8)
KEPIČ, P.; LIGMAJER, F.; HRTOŇ, M.; REN, H.; MENEZES, L.; MAIER, S.; ŠIKOLA, T., 2021: Optically Tunable Mie Resonance VO2 Nanoantennas for Metasurfaces in the Visible. ACS PHOTONICS 8 (4), p. 1048 - 10, doi: 10.1021/acsphotonics.1c00222 (EVAPORATOR, MIRA-EBL, WITEC-RAMAN, WOOLLAM-VIS)
USSIA, M.; URSO, M.; DOLEŽELÍKOVÁ, K.; MICHÁLKOVÁ, H.; ADAM, V.; PUMERA, M., 2021: Active Light-powered antibiofilm ZnO micromotors with chemically programmable properties. ADVANCED FUNCTIONAL MATERIALS 31 (27), p. 1 - 10, doi: 10.1002/adfm.202101178 (MIRA-EBL, RIGAKU9, KRATOS-XPS)
Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS, p. 1 - 113 (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
Babocký, J., 2020: Fabrication and characterization of nanostructures with functional properties in the field of plasmonics. PH.D. THESIS, p. 1 - 104 (MIRA-EBL, RAITH, EVAPORATOR, ICON-SPM)
Wojewoda, O., 2020: Phase-resolved Brillouin light scattering: development and applications. MASTER'S THESIS (ICON-SPM, BRILLOUIN, EVAPORATOR, LYRA, MIRA-EBL, KERR-MICROSCOPE)
Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER'S THESIS, p. 1 - 57 (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD-FIJI)
Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M , 2020: Propagation of spin waves through a Neel domain wall. APPLIED PHYSICS LETTERS 117 (2), p. 022405-1 - 5, doi: 10.1063/5.0013692 (EVAPORATOR, KERR-MICROSCOPE, ICON-SPM, LYRA, BRILLOUIN, MIRA-EBL)
LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326 (EVAPORATOR, LYRA, RIE-FLUORINE, MIRA-EBL, ICON-SPM)
Horák, M., 2020: Electron microscopy and spectroscopy in plasmonics. PH.D. THESIS, p. 1 - 129 (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)
KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T., 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9 (3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326 (HELIOS, MIRA-EBL, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER'S THESIS, p. 1 - 55 (MAGNETRON, MIRA-EBL, RAITH, ICON-SPM, CRYOGENIC, VERSALAB)
Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER'S THESIS, p. 1 - 50 (MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER'S THESIS, p. 1 - 64 (LYRA, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER)
Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR'S THESIS, p. 1 - 46 (MAGNETRON, ICON-SPM, CRYOGENIC, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB)
BOUCHAL, P.; DVOŘÁK, P.; BABOCKÝ, J.; BOUCHAL, Z.; LIGMAJER, F.; HRTOŇ, M.; KŘÁPEK, V.; FAßBENDER, A.; LINDEN, S.; CHMELÍK, R.; ŠIKOLA, T., 2019: High-Resolution Quantitative Phase Imaging of Plasmonic Metasurfaces with Sensitivity down to a Single Nanoantenna. NANO LETTERS 19 (2), p. 1242 - 9, doi: 10.1021/acs.nanolett.8b04776 (EVAPORATOR, MIRA-EBL, VERIOS)
Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS, p. 1 - 139 (ALD-FIJI, DIENER, EVAPORATOR, MIRA-EBL, PECVD, WIRE-BONDER)
DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817 (MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)
Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER'S THESIS, p. 1 - 83 (LYRA, HELIOS, KERR-MICROSCOPE, ICON-SPM, MIRA-EBL, EVAPORATOR, WIRE-BONDER)
Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS, p. 1 - 45 (MIRA-EBL, EVAPORATOR, FTIR)
HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8 (1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1 (TITAN, HELIOS, MIRA-EBL, EVAPORATOR, ICON-SPM)
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS, p. 1 - 54 (PECVD, MIRA-EBL, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)
Musálek, T., 2016: Semiconductor nanowire growth utilizing alloyed catalyst. MASTER’S THESIS, p. 1 - 52 (VERIOS, LYRA, MIRA-EBL, ALD-FIJI)