4-probe station Cascade Microtech MPS 150
Technologies for ensuring the dies to be properly interconnected and packaged with high precision, accuracy and reliability to eliminate damage of dies and enable easy manipulation. Supporting inspection technologies should provide the possibility of optical surface monitoring and inspection of interconnection and soldering process. Electrical characterization probe station is also planned, as well as temperature dependencies and working stress testing of fabricated dies.
Specification
- Preheat the chuck up to 300°C
- Pureline technology for premium signal integrity
- Attoguard technology for enhanced IV and CV measurements
- manual 3-axis precision stage up to 6-inch
- 200mm chuck with FemtoGuard technology providing:
- Ultra-low noise measurements and controlled leakage
- Low residual capacitance for repeatability
- Advanced measurement accuracy and speed
- 3 vacuum switch units
- Optical microscope mounted on a large area bridge with 8 x 6`` X-Y transport
- High-performance PCI video digitizer card enabling ‘’full-motion’’ live video
Main parameters
- Chuck Travel: stanïnless steel 155 mm x 155 mm (6 in. x 6 in.) X-Y stage travel.
- Planarity:
< +- 3 µm (Standard & RF chucks),over 150 mm (overall).
- Resolution:
5 µm (0.2 mils) on X-Y-Z axes.
- Theta Travel:
360° (coarse),+-8°(fine).
- Platen Contact/Separation:
200 µm
- Wafer Size: 25 mm (1 in.) to 150 mm (6 in.).
- Compatibility: Up to 12x DPP105 or 4x high-end positioners (e.g., DPP2xx/3xx/4xx/RPP210).
- Optical Stage:
150 x 100 mm
Four triax probe arms p
Humidity < 30%
Leakage (1 sigma) < 2 fA
Resistance (F-G) > 50 TΩ
Resistance (G-S) NA
Residual capacitance @ 3 pA Tx < 0.3 fF
Capacitance @ 300 pA (F-G) < 150 pF
Capacitance @ 300 pA (G-S) < 200 pF
Electrical performance
Breakdown voltage: ≥ 500V
Probe leakage: ≤1 fA
Chuck leakage: ≤15 fA
Gallery
Publications
ZHANG, T.; HOLZER, J.; VYSTAVĚL, T.; KOLÍBAL, M.; PAIVA DE ARAÚJO, E.; STEPHENS, C.; BEN BRITTON, T., 2025: Characterization of WSe2 Films Using Reflection Kikuchi Diffraction in the Scanning Electron Microscope and Multivariate Statistical Analyses. ACS NANO 19 (44), p. 38360 - 38370, doi: 10.1021/acsnano.5c10753 (MPS150, NANOSCAN, WITEC-RAMAN)
KASPAR, P.; ŠIŠKA VIRÁGOVÁ, E.; DALLAEV, R.; PAPEŽ, N.; MACKŮ, R.; GRMELA, L.; ŠIK, O.; SEDLÁK, P.; SOBOLA, D., 2025: Structural analysis of imperfections in contacts of graphene chemiresistors. APPLIED SURFACE SCIENCE 704, doi: 10.1016/j.apsusc.2025.163501 (HELIOS, TITAN, WITEC-RAMAN, SIMS, KEITHLEY-4200, MPS150)
Horký, M., 2025: Controlling the magnetic phase transition in spatially confined structures. PH.D. THESIS, p. 1 - 181 (RAITH, MIRA-EBL, LYRA, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines. ACS APPLIED ELECTRONIC MATERIALS 6 (12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450 (ALD-FIJI, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, WITEC-RAMAN, WIRE-BONDER, NANOSCAN)
GHOSH, K.; NG, S.; LAZAR, P.; KANDAMBATH PADINJAREVEETIL, A.; MICHALIČKA, J.; PUMERA, M., 2024: 2D Germanane-MXene Heterostructures for Cations Intercalation in Energy Storage Applications. ADVANCED FUNCTIONAL MATERIALS, doi: 10.1002/adfm.202308793 (RIGAKU3, KRATOS-XPS, WITEC-RAMAN, TITAN, VERIOS, KEITHLEY-4200, MPS150, BET-ANAMET)
KAMNEV, K.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KEJÍK, L.; GUELL, F.; LLOBET, E.; MOZALEV, A., 2023: Se-doped Nb2O5-Al2O3 composite-ceramic nanoarrays via the anodizing of Al/Nb bilayer in selenic acid. CERAMICS INTERNATIONAL 49 (22), p. 34712 - 14, doi: 10.1016/j.ceramint.2023.08.134 (MAGNETRON, VERIOS, KRATOS-XPS, WITEC-RAMAN, MPS150, KEITHLEY-4200)
GHOSH, K.; IFFELSBERGER, C.; KONEČNÝ, M.; VYSKOČIL, J.; MICHALIČKA, J.; PUMERA, M., 2023: Nanoarchitectonics of Triboelectric Nanogenerator for Conversion of Abundant Mechanical Energy to Green Hydrogen. ADVANCED ENERGY MATERIALS 13 (11), doi: 10.1002/aenm.202203476 (VERIOS, MIRA-STAN, TITAN, RIGAKU3, ICON-SPM, MPS150, KEITHLEY-4200)
KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24 (1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324 (MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, KRATOS-XPS, MPS150)
NG, S.; GHOSH, K.; VYSKOČIL, J.; PUMERA, M., 2022: Two-dimensional vanadium sulfide flexible graphite/polymer films for near-infrared photoelectrocatalysis and electrochemical energy storage. CHEMICAL ENGINEERING JOURNAL 435 (P3), p. 135131-1 - 14, doi: 10.1016/j.cej.2022.135131 (MPS150, KEITHLEY-4200, VERIOS, KRATOS-XPS, WITEC-RAMAN, RIGAKU3)
GHOSH, K.; NG, S.; IFFELSBERGER, C.; PUMERA, M., 2022: 2D MoS2/carbon/polylactic acid filament for 3D printing: Photo and electrochemical energy conversion and storage. APPLIED MATERIALS TODAY 26, p. 101301-1 - 10, doi: 10.1016/j.apmt.2021.101301 (VERIOS, KRATOS-XPS, RIGAKU3, MPS150, KEITHLEY-4200)
Sreedhara, MB.; Bukvisova, K.; Khadiev, A.; Citterberg, D.; Cohen, H.; Balema, V.; Pathak, AK.; Novikov, D.; Leitus, G.; Kaplan-Ashiri, I.; Kolibal, M.; Enyashin, AN.; Houben, L.; Tenne, R., 2022: Nanotubes from the Misfit Layered Compound (SmS)(1.)19TaS2: Atomic Structure, Charge Transfer, and Electrical Properties. CHEMISTRY OF MATERIALS 34 (4), p. 1838 - 16, doi: 10.1021/acs.chemmater.1c04106 (TITAN, HELIOS, RAITH, EVAPORATOR, MPS150, KEITHLEY-4200, ALD-FIJI)
KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: Comparison of on-chip MIS capacitors based on stacked HfO2/Al2O3 nanolaminates. MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664 (ALD-FIJI, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS)
GABLECH, I.; BRODSKÝ, J.; VYROUBAL, P.; PIASTEK, J.; BARTOŠÍK, M.; PEKÁREK, J., 2022: Mechanical strain and electric-field modulation of graphene transistors integrated on MEMS cantilevers. JOURNAL OF MATERIALS SCIENCE 57 (3), p. 1923 - 13, doi: 10.1007/s10853-021-06846-6 (RIE-FLUORINE, DRIE, EVAPORATOR, WIRE-BONDER, WITEC-RAMAN, MPS150, KEITHLEY-4200, SUSS-MA8, DWL)
Vodička, M., 2022: Fabrication and characterisation of plasmonic antennas on selected thin film with aim to get enhanced absorption due to presence of strong coupling. BACHELOR'S THESIS, p. 1 - 60 (MIRA-EBL, FTIR, EVAPORATOR, MPS150)
Děcký, M., 2022: Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas. BACHELOR'S THESIS, p. 1 - 44 (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)
Kamnev, K., 2022: Porous-alumina-assisted formation of metal and metal-oxide nanostructures for use in advanced micro-devices. PH.D. THESIS, p. 1 - 145 (VERIOS, HELIOS, TITAN, MAGNETRON, MPS150, KEITHLEY-4200)
KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Anodic formation of HfO2 nanostructure arrays for resistive switching application. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON), p. 122 - 5, doi: 10.37904/nanocon.2020.3692 (MAGNETRON, VERIOS, MPS150)
Pejchal, T., 2021: Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis. PH.D. THESIS (NANOSAM, WITEC-RAMAN, VERIOS, KRATOS-XPS, HELIOS, TITAN, ALD-FIJI, EVAPORATOR, MIRA-EBL, MPS150)
Brodský J., 2021: Gas sensors based on 1D and 2D materials. MASTER'S THESIS, p. 1 - 84 (DWL, DIENER, SUSS-RCD8, SUSS-MA8, EVAPORATOR, MPS150, WITEC-RAMAN, ICON-SPM, RIE-FLUORINE, DRIE, LYRA)
Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS, p. 1 - 199 (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
Tesař, J., 2020: Fabrication and characterization of atomically thin layers. MASTER'S THESIS, p. 1 - 67 (WITEC-RAMAN, MPS150, UHV-LEEM, EVAPORATOR, RAITH, ICON-SPM, WIRE-BONDER)
Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR'S THESIS, p. 1 - 50 (MPS150, WITEC-RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER'S THESIS, p. 1 - 50 (MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER'S THESIS, p. 1 - 68 (DWL, ALD-FIJI, MAGNETRON, EVAPORATOR, RIE-FLUORINE, RIE-CHLORINE, SUSS-MA8, DEKTAK, MPS150)
HRDÝ, R.; KYNCLOVÁ, H.; KLEPÁČOVÁ, I.; BARTOŠÍK, M.; NEUŽIL, P., 2017: Portable Lock-in Amplifier-Based Electrochemical Method to Measure an Array of 64 Sensors for Point-of-Care Applications. ANALYTICAL CHEMISTRY 89 (17), p. 8731 - 7, doi: 10.1021/acs.analchem.7b00776 (MPS150, WIRE-BONDER)
CHMELA, O.; SADÍLEK, J.; VALLEJOS VARGAS, S.; HUBÁLEK, J., 2017: Microelectrode array system as platforms for single nanowire based sensors. JOURNAL OF ELECTRICAL ENGINEERING 68 (2), p. 158 - 5, doi: 10.1515/jee-2017-0023 (DWL, KAUFMAN, MPS150, RIGAKU3)