Semi-automated 4-probe system Cascade Microtech SUMMIT 12000
The research will focus on the characterization, modelling, simulation, defect diagnostics of semiconductor materials and nanostructures and on a development of advanced measurement methods. Lab will work on assessment of quality and reliability indicators of perspective materials (passive and active) for nanoelectronics applications. This research of device reliability will be supported by noise and dielectric spectroscopy, by measurement of local optical and optoelectronic characteristics in the near field region.
Specification
- Integrated microchamber for dark, dry, and EMI shielding
- Pureline technology for premium signal integrity
- Attoguard technology for enhanced IV and CV measurements
- 4-axis precision motorized stage
- 200mm chuck with FemtoGuard technology providing:
- Ultra-low noise measurements and controlled leakage
- Low residual capacitance for repeatability
- Advanced measurement accuracy and speed
- Automated microscope mounted on a large area bridge with 12x 6`` X-Y transport
- High-performance PCI video digitizer card enabling ‘’full-motion’’ live video, resizable windows, ‘’point & shoot’’ wafer navigation, and so on.
Main parameters
Stage
Travel : 203 x 203 mm
Resolution: 1um
Repeatability: ≤ 2um
Accuracy: ≤ 2.5um
Z travel: 5mm
Theta Stage travel: ± 5.5º
Wafer chuck
Triax connectors
Au material
Electrical performance
Breakdown voltage: ≥ 500V
Probe leakage: ≤1 fA
Chuck leakage: ≤15 fA
Gallery
Publications
KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: Comparison of on-chip MIS capacitors based on stacked HfO2/Al2O3 nanolaminates. MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664 (ALD-FIJI, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS)
Vida, J., 2019: Deposition of ternary oxides with titanium and characterization of their optical and electrical properties. MASTER'S THESIS, p. 1 - 50 (KRATOS-XPS, ALD-FIJI, WOOLLAM-VIS, VUVAS, RIGAKU3, EVAPORATOR, SUSS-MA8, SUMMIT)
Pekárek, J.; Prokop, R.; Svatoš, V.; Gablech, I.; Hubálek, J.; Neužil, P., 2017: Self-compensating method for bolometer–based IR focal plane arrays. SENSORS AND ACTUATORS, A: PHYSICAL 265, p. 40 - 46, doi: 10.1016/j.sna.2017.08.025 (SUSS-MA8, EVAPORATOR, RIE-FLUORINE, SUMMIT, SCIA)