Coater Leica EM ACE600

"High vacuum coater for deposition of conductive coatings on SEM and TEM samples. Processes are driven by built-in microprocessor control unit and are fully automatized. Process steps and parameters are set through a touch screen. Equipped with Au sputter target and carbon thread evaporation source as standard. Other targets for sputtering are available by the same device located in building C."

Specification

Process vacuum	5x10⁻⁵ mbar @ 15 min
Ultimate vacuum	2x10⁻⁶ mbar @ 24 hour
Working distance	min. 30 mm, max. 100 mm (z movement motorized)
Specimen table	diameter 104 mm
Stage tilt	+/- 60° (motorized)
Coating time	1–1800 s (without respect to sample damage)
Coating thickness	1–1000 nm
Coating thickness detection	oscillating quartz crystal, readout resolution: one decimal (0.1 nm accuracy)
Process gas for sputtering	Argon 99,99 % or better
Venting gas	Nitrogen 99,99 %

Available materials for deposition

Material	Deposition method	Deposition source
Carbon (C)	evaporation	carbon thread
Gold (Au)	sputtering	target

Gallery

Details

Type of access

Full-service (paid), Self-service

Research area

Synthesis