Mechanical profilometer Bruker Dektak XT
The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides a step-height repeatability of 5Å (<0.6 nm). In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.
Publications
KAŠTYL, J.; CHLUP, Z.; ŠŤASTNÝ, P.; TRUNEC, M., 2020: Machinability and properties of zirconia ceramics prepared by gelcasting method. ADVANCES IN APPLIED CERAMICS 119 (5-6), p. 252 - 9, doi: 10.1080/17436753.2019.1675402 (DEKTAK, VERIOS)
Kunc, J.; Rejhon, M.; Dědič, V.; Bábor, P., 2019: Thickness of sublimation grown SiC layers measured by scanning Raman spectroscopy. JOURNAL OF ALLOYS AND COMPOUNDS 789, p. 607 - 612, doi: 10.1016/j.jallcom.2019.02.305 (DEKTAK, SIMS)
Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER'S THESIS, p. 1 - 68 (DWL, ALD-FIJI, MAGNETRON, EVAPORATOR, RIE-FLUORINE, RIE-CHLORINE, SUSS-MA8, DEKTAK, MPS150)
Gallery
