Ion-Beam Sputter Deposition System BESTEC
UHV sputter deposition system is equipped with two RFICP Kaufman ion-beam sources (KRI®) with 4 cm diameter grids (3-grid primary and 2-grid assisted/secondary) and charge neutralizer (LFN 2000 - KRI®). This setup is suitable for Ion-beam sputter deposition, Ion-beam assisted deposition, reactive sputter deposition with nitrogen and in-situ initial/continual substrate (pre-)cleaning. Etching (ion-milling) is not possible due to undesirable chamber and targets contamination.
Specification
Methods
Ion beam assisted deposition of Ti, Al, W, Hf, Ta, ZrGallery
Publications
GABLECH, I.; MIGLIACCIO, L.; BRODSKÝ, J.; HAVLÍČEK, M.; PODEŠVA, P.; HRDÝ, R.; EHLICH, J.; GRYSZEL, M.; GLOWACKI, E., 2023: High-Conductivity Stoichiometric Titanium Nitride for Bioelectronics. ADVANCED ELECTRONIC MATERIALS 9 (4), p. 1 - 11, doi: 10.1002/aelm.202200980 (KAUFMAN, ICON-SPM, PARYLENE-SCS, LYRA, KRATOS-XPS, RIGAKU3, KEITHLEY-4200)
EHLICH, J.; MIGLIACCIO, L.; SAHALIANOV, I.; NIKIĆ, M.; BRODSKÝ, J.; GABLECH, I.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2022: Direct measurement of oxygen reduction reactions at neurostimulation electrodes. JOURNAL OF NEURAL ENGINEERING 19 (3), p. 36045 - 15, doi: 10.1088/1741-2552/ac77c0 (KAUFMAN, MAGNETRON)
Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS, p. 1 - 100 (KERR-MICROSCOPE, ICON-SPM, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD-FIJI, WIRE-BONDER, SUSS-RCD8)
GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; HRABINA, J.; HOLÁ, M.; KUNZ, J.; BRODSKÝ, J.; NEUŽIL, P., 2020: Simple and efficient AlN-based piezoelectric energy harvesters. MICROMACHINES 11 (2), p. 1 - 10, doi: 10.3390/mi11020143 (DRIE, RIE-CHLORINE, WIRE-BONDER, KAUFMAN)
Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS, p. 1 - 199 (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
GABLECH, I.; SVATOŠ, V.; CAHA, O.; DUBROKA, A.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.; SCHNEIDER, M.; ŠIKOLA, T., 2019: Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup. THIN SOLID FILMS 670, p. 105 - 8, doi: 10.1016/j.tsf.2018.12.035 (KAUFMAN, ICON-SPM, RIGAKU9, WOOLLAM-VIS)
GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; KUNZ, J.; NEUŽIL, P., 2019: Aluminum nitride based piezoelectric harvesters. 2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS) (001), p. 1 - 4, doi: 10.1109/PowerMEMS49317.2019.82063211368 (DIENER, DRIE, DWL, KAUFMAN, RIE-CHLORINE, SUSS-MA8)
Bendova, M.; Kolar, J.; Marik, M.; Lednicky, T.; Mozalev, A., 2018: Influence of nitrogen species on the porous-alumina-assisted growth of TiO 2 nanocolumn arrays. ELECTROCHIMICA ACTA 281, p. 796 - 809, doi: 10.1016/j.electacta.2018.05.197 (KAUFMAN, HELIOS, TITAN, KRATOS-XPS, RIGAKU9)
CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10 (19), p. 9087 - 10, doi: 10.1039/c8nr01588k (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817 (MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)
GABLECH, I.; CAHA, O.; SVATOŠ, V.; PRÁŠEK, J.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T., 2018: Preparation of [001] Oriented Titanium Thin Film for MEMS Applications by Kaufman Ion-beam Source. 9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017), p. 117 - 6 (KAUFMAN, RIGAKU9)
Gablech, I., 2016: CMOS compatible piezoelectric resonator with FET structure for graphene monolayer properties modulation. TREATISE TO STATE DOCTORAL EXAM, p. 1 - 31 (KAUFMAN, ICON-SPM, RIGAKU9)