Spectroscopic reflectometer Ocean Optics NanoCalc 2000
Multilayers characterization of transparent materials, such as lithography resists, oxides or thin metals in reflection mode. The interval of measured film thickness is from 10 nm up to 100 um.
Specification
Methods
Resist thickness measurement mainly. Film thickness from 10 nm up to 100 µm.| Spectral Range | 250 – 1100 nm |
|---|---|
| Total thickness range | 10 nm – 100 um |
| Resolution | 0.1 nm |
| Repetability | 0.3 nm |
| Absolute accuracy | < 1 % (100 nm – 10 um) |
| Number of layers | up to 10 layers |
| Distance with fiber | 1 – 5 mm |
| Angle with optic | 90° (nominal incidence) |
| Spot size | 400 um (optional 100/200 um |
| Fiber length | 2 m (other lengths available on request) |
Gallery
Publications
Horký, M., 2025: Controlling the magnetic phase transition in spatially confined structures. PH.D. THESIS, p. 1 - 181 (RAITH, MIRA-EBL, LYRA, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
Koňařík, L., 2024: Development and fabrication of microelectromechanical systems MEMS. BACHELOR'S THESIS, p. 1 - 46 (LASER-DICER, DWL, EVAPORATOR, RIE-FLUORINE, DRIE, NANOCALC, DEKTAK, WIRE-BONDER, LYRA)
GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107 (12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144 (ALD-FIJI, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, ICON-SPM, WOOLLAM-MIR)
Idesová, B., 2023: Design and fabrication of dielectric metasurfaces for ultraviolet wavelengths. MASTER'S THESIS, p. 1 - 71 (EVAPORATOR, ALD-FIJI, RAITH, NANOCALC, SCIA)
Jarušek, J., 2022: Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications. BACHELOR'S THESIS, p. 1 - 75 (DEKTAK, KAUFMAN, RIE-CHLORINE, NANOCALC, RIGAKU9, KEITHLEY-4200)
Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS, p. 1 - 199 (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS, p. 1 - 54 (PECVD, MIRA-EBL, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)